Dynamics of Detonations and Explosions: Explosion Phenomena by A. L. Kuhl, J. C. Leyer, A. A. Borisov, W. A. Sirignano

By A. L. Kuhl, J. C. Leyer, A. A. Borisov, W. A. Sirignano

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18. , An ultra-low-power, radiation-tolerant Reed–Solomon Encoder for space applications. Proceedings of the Custom Integrated Circuits Conference, pp. 631– 634 (2003). 2005 8:59pm MEMS Fabrication James J. 4 Introduction.................................................................................................... 35 MEMS Fabrication Technologies ................................................................. 36 LIGA ..............................................................................................................

2 LIGA fabrication sequence. will enable the electroplating of the LIGA base material. A frequently used seed material would be a sputter-deposited alloy of titanium and nickel. Then a thick layer of the resist material, polymethylmethacrylate (PMMA), is applied. The synchrotron provides a source of high-energy collimated x-ray radiation needed to expose the thick layer of resist material. The exposure system of the mask and x-ray synchrotron radiation can produce vertical sidewalls in the developed PMMA layer.

The silicon MEMS gyros sense angular rate by detecting the Coriolis effect on a sense mass that is driven into oscillation by electrostatic motors. Coriolis forces proportioned to the rotational rate of the body cause the sense mass to oscillate out of plane. This change is measured by capacitive plates. A more detailed discussion of MEMS inertial sensors, both gyros and accelerometers, is presented in Chapter 10 of this book. The ISC technology, enabled by embedded MEMS gyroscopes, is a precursor of things to come in the spacecraft avionics arena as the push toward much more highly integrated, GN&C systems grows in the future.

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